IATE
IATE-116242
HTML
RDF/XML
N-Triples
Turtle
JSON-LD
Instance of:
http://www.w3.org/2004/02/skos/core#Concept
Subject Field
Subject Field/3606
Is
Reference
of
PECVD-en#Sense
ΥΠΧΕΑ-el#Sense
Plasma enhanced chemical vapour deposition-en#Sense
ΧΕΑ υποβοηθούμενη από πλάσμα-el#Sense