Instance of: http://www.w3.org/2004/02/skos/core#Concept
Subject Field Subject Field/3606
Is Reference of PECVD-en#Sense
ΥΠΧΕΑ-el#Sense
Plasma enhanced chemical vapour deposition-en#Sense
ΧΕΑ υποβοηθούμενη από πλάσμα-el#Sense