IATE

IATE-157340

Instance of: http://www.w3.org/2004/02/skos/core#Concept
Subject Field Subject Field/3606
Is Reference of Etsen door middel van droge methoden (plasma)-nl#Sense
Torr plasmaetsning-sv#Sense
Plasma-tørætsningsudstyr-da#Sense
Ξερή χάραξη με πλάσμα-el#Sense
Plasmakuivasyövytyslaite-fi#Sense
Plasma dry etching-en#Sense
Trockenätzen im Plasma-de#Sense
Méthode sèche anisotrophique-fr#Sense
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